Monolithic Integration of Polymer and Silicon Nitride Waveguides for Optical Phased Array LiDAR

Title: Monolithic Integration of Polymer and Silicon Nitride Waveguides for Optical Phased Array LiDAR Sensors Author: Eun-Su Lee{2}, Kwon-Wook Chun{2}, Jinung Jin{2}, Sang-Shin Lee{1}, Min-Cheol Oh{2} Affiliation: {1}Kwangwoon University, Korea; {2}Pusan National University, Korea Abstract: Monolithic integration of polymer waveguide phase modulators and silicon nitride waveguides has been achieved for optical phased array (OPA) beam scanners. The monolithic integration of polymer and SiN waveguides using adiabatic transition tapers has enabled the efficient connection of the two heterogeneous waveguides. The Pπ of polymer phase modulator was measured as 22.4 mW with a rise time of 119 μs. Furthermore, the monolithic integration of the two heterogeneous waveguides is shown to be highly viable for implementing a reliable OPA LiDAR.